Marc wrote:
> We are performing a Chemical Vapor Deposition process (tubular furnace,
> 950ºC, 200 sccm Methane, 200 sccm H2, with Argon flow before and after
> the process), and we get a grey-black-metallic coloured film covering
> the quartz tube (we think it is carbon). Is there any solvent to remove
> this carbon film?
If rubbing will not take it off, try boiling aqueous peroxydisulfate
solution (made fresh), maybe with a trace of silver ion added as
catalyst or with 254 nm UV to push it. The simple solution may be to
run some oxygen plasma through it after the fun is over - whether the
deposit is carbon or silicon monoxide (which is also likely).
If you are attacking your quartz you must be concerned with
contamination downstream as well as local recrystallization to
crystobalite that will crack the fused silica on cooling.

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Paul J. Franklin(moderator - sci.chem.organic.synthesis)
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Mark Tarka - 16 Sep 2003 17:23 GMT
Marc <mace@quimica.urv.es> wrote in message news:<bjt7e2$84r@panther.Gsu.EDU>...
> We are performing a Chemical Vapor Deposition process (tubular furnace,
> 950ºC, 200 sccm Methane, 200 sccm H2, with Argon flow before and after
> the process), and we get a grey-black-metallic coloured film covering
> the quartz tube (we think it is carbon). Is there any solvent to remove
> this carbon film?
Where's the source of your carbon...methane,
something other...?
Mark (Old chemists never die, they just get
pissed off and leave :-)

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Paul J. Franklin(moderator - sci.chem.organic.synthesis)
http://organicworldwide.net/sci.chem.organic.synthesis
Georgia State University <chepjf@panther.gsu.edu>
Atlanta, GA
dave.lister@web.de - 30 Sep 2003 18:12 GMT
Marc <mace@quimica.urv.es> wrote in message news:<bjt7e2$84r@panther.Gsu.EDU>...
> We are performing a Chemical Vapor Deposition process (tubular furnace,
> 950ºC, 200 sccm Methane, 200 sccm H2, with Argon flow before and after
> the process), and we get a grey-black-metallic coloured film covering
> the quartz tube (we think it is carbon). Is there any solvent to remove
> this carbon film?
I am not sure, but carbon & black tar residues from my organic
syntheses gone sour came out with:
Conc. sulphuric acid freshly mixed with 30% hydrogen peroxide. Don't
try this at home, be careful, let someone else do it, careful: gets
piping boiling hot.
Read up on this stuff before you use it. Wear protective clothing even
when you are in the next room.
Geezz.. please add all possible warnings here.

Signature
Paul J. Franklin(moderator - sci.chem.organic.synthesis)
http://organicworldwide.net/sci.chem.organic.synthesis
Georgia State University <chepjf@panther.gsu.edu>
Atlanta, GA
LOUIS - 06 Oct 2003 16:33 GMT
KMnO4/H2SO4 (<60%) is a good way to get rid of carbon deposits.
PhZ
dave.lister@web.de wrote:
> Marc <mace@quimica.urv.es> wrote in message news:<bjt7e2$84r@panther.Gsu.EDU>...
> > We are performing a Chemical Vapor Deposition process (tubular furnace,
> > 950ºC, 200 sccm Methane, 200 sccm H2, with Argon flow before and after
> > the process), and we get a grey-black-metallic coloured film covering
> > the quartz tube (we think it is carbon). Is there any solvent to remove
> > this carbon film?
> I am not sure, but carbon & black tar residues from my organic
> syntheses gone sour came out with:
> Conc. sulphuric acid freshly mixed with 30% hydrogen peroxide. Don't
> try this at home, be careful, let someone else do it, careful: gets
> piping boiling hot.
> Read up on this stuff before you use it. Wear protective clothing even
> when you are in the next room.
> Geezz.. please add all possible warnings here.

Signature
Paul J. Franklin(moderator - sci.chem.organic.synthesis)
http://organicworldwide.net/sci.chem.organic.synthesis
Georgia State University <chepjf@panther.gsu.edu>
Atlanta, GA